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Ulvac Vacuum Pump LR600

ULVAC Dry Vacuum Pump

Here we offer a ULVAC dry vacuum pump.

ULVAC Dry Vacuum Pump

Solution for demanding process applications

Dry vacuum pump

ULVAC's unique approach to utilizing the latent heat within the pump body enables the LR/HR/UR series to deliver performance even in the most demanding processes.
ULVAC has focused its design efforts on maintaining an extremely uniform high temperature across all pump stages, optimizing this pump family for CVD and etching applications.
Compatible with the ULVAC ECO-SHOCK system for additional energy savings.

Features

The LR series pump is designed for load-lock chambers and PVD processes.
ULVAC's unique aluminum design enables a very uniform temperature distribution throughout the pump body:
The ULVAC LR series pump is designed for applications that require a heated pump, heated gas lines, and/or heated exhaust lines.
Excellent helium pumping capacity
Encapsulated motor for safety and ease of maintenance
Withstands power interruptions of up to 500 ms.
Internal components are specially treated to ensure a high degree of surface hardness and excellent corrosion resistance.
This prevents wear of internal pump parts when exposed to corrosive gases.
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(LR Series)
Designed for process gases that generate powdery by-products, such as Si crystal growth furnaces
Pre-pump for turbo-molecular and mechanical booster pumps

Type: LR600

Condition: new

Scope of delivery: (See picture)

(Changes and errors in technical data and specifications are subject to change!)

We will be happy to answer any further questions you may have by telephone.

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