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Lambdaphysik (jetzt Coherent) LPF 202 Excimer Laser, F2 Version

Lambdaphysik
Type: LPF 202 Excimer Laser, F2 Version, 400 V
Laser beam source by Lambdaphysik (now Coherent)
LPF 202 F2 lasers are pulsed VUV lasers with a wavelength of 157 nm and a pulse duration of approximately 20 ns.
LPF F2 lasers are highly efficient light sources featuring a compact design. They offer the shortest commercially available laser wavelength. These lasers deliver unique results in demanding applications, e.g., precise material processing, photolithography, and materials research (PLD), including for materials that do not absorb other wavelengths. The optical beam path of these lasers must be purged or evacuated with nitrogen.

Applications
• Micro- and nanostructuring of polymers
• Laser lithography
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• Pulsed Laser Deposition (PLD)

Max. pulse energy: 50 mJ
Wavelength: 157 nm
Max. repetition rate: 20 Hz
Electrical:
380 - 400 V AC, 12 A, 50 Hz, 3-phase
Dimensions (laser head) L x W x H: 1966 x 475 x 800 mm³
Weight (with power supply and pump): 550 kg
Condition: used / gebraucht
Year of initial operation: 2001
Functionality: Control system and pump operational, laser last operated in 2011
Filling: Inert gas
User manual: available
Scope of delivery: (see photo)
Sample quotation: (see attachment)
(Subject to change and error in technical data and information!)
We would be happy to answer further questions by phone.

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