نظام القياس البصري

Keyence IM-6125

Two identical Keyence measuring devices are available. Image sensor: 1inch 6.6 megapixel CMOS, lens: Double telecentric lens. Wide field diameter/length: 100mm/200mm, High precision diameter/length: 25mm/125mm. Repeatability: Without stage movement: +/-1µm(wide field), +/-0.5µm(high precision), with stage movement: +/-2µm(wide field), +/-1.5µm(high precision). Measuring accuracy (+/-2 sigma): Without binding: +/-5µm(wide field), +/-2µm(high precision), with binding: +/- (7+0.02L)µm(wide field), +/-(4 +0.02L)µm(high precision).
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